用于质量传感的内平面环共振器的非线性动力学
Saber Azizi1, Hadi Madinei1, Hamed Haddad Khodaparast1
1Aerospace department, Faculty of Science and Engineering, Swansea University, Swansea, UK.
概括
这项研究引入了一种新型的旋转环共振器,用于高度敏感的质量传感. 它利用非线性动力学和降低阻尼,比传统的MEMS传感器提高性能.
科学领域:
- 机械工程 机械工程
- 纳米技术 纳米技术
- 传感器技术 传感器技术
背景情况:
- 微电子机械系统 (MEMS) 对于环境,医疗和化学应用中的敏感质量检测至关重要.
- 流体缓显著降低了传统MEMS质量传感器的质量因子和灵敏度.
- 基于悬臂式传感器的传感器在翻译外平面模式中经常遭受高阻尼.
研究的目的:
- 为增强质量传感提供旋转环共振器.
- 研究拟议的共振器的非线性动力学和分叉行为.
- 为了证明改进的性能指标,如降低阻尼和更高的质量因子.
主要方法:
- 设计和建模一个由细梁支的旋转环共振器.
- 将结构置于旋转基底激发的条件下.
- 分析频率响应曲线上的非线性动态和分叉点.
主要成果:
- 与悬臂传感器相比,旋转环共振器表现出较低的阻尼和更高的质量因子.
- 通过观察非线性分叉点的变化来实现质量检测.
- 在超声波系统中的非线性共振区,可以在初级共振的特定部分进行质量检测.
- 通过共振频率转移,也可以检测线性状态的质量.
结论:
- 旋转环共振器为提高性能的敏感质量传感提供了一个有前途的平台.
- 使用非线性动力学为质量检测提供了一种新的方法,提高了灵敏度.
- 飞机内旋转模式设计有效地将减噪降到最低,从而实现更优质的传感器操作.
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