快速微镜选择和角度设置算法用于沉浸式光刻机的照明系统中的自由形瞳孔
Zhenxin Huang1,2, Zenghui Yang1,2, Aijun Zeng3,4
1Department of Advanced Optical and Microelectronic Equipment, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, 201800, China.
Scientific reports
|December 21, 2025
概括
一个新的算法优化了微镜阵列 (MMA) 用于沉浸式光刻,改善了用于先进半导体制造的能量平衡和极化控制. 这提高了40nm以下节点的成像性能.
科学领域:
- 光学工程是指光学工程.
- 半导体制造业 半导体制造业
背景情况:
- 沉浸式光刻机中的照明瞳孔的严格性能要求是由提高光刻分辨率所驱动的.
- 能量平衡和极化特性对于先进的光刻技术至关重要,尤其是40nm以下的技术节点.
- 微镜阵列 (MMA) 用于根据学生特征调整角分布.
研究的目的:
- 提出一种微镜选择和角度设置算法,以保持自由形瞳孔的特征.
- 为了确保在无极化和极化状态的能量平衡,用于沉浸式光刻.
- 为了提高工程应用的计算速度.
主要方法:
- 开发了一种微镜选择和角度设置算法.
- 用于模拟的自由形瞳孔照明光学模型.
- 验证了算法准确性,用于非极化和极化光状态.
主要成果:
- 实现了能源平衡的显著改善,使其在非极化和极化状态下降到0.08%.
- 证明了算法在保持自由形瞳孔的关键特征方面的有效性.
- 提高了计算速度,将计算时间从600秒缩短到0.1秒.
结论:
- 拟议的算法有效地确保了能量平衡,并保持了沉浸式光刻中的自由形瞳孔特征.
- 该算法的计算效率使其适用于工程应用.
- 这项工作有助于提高高分辨率半导体光刻技术的进步.
更多相关视频
相关概念视频
Imaging Biological Samples with Optical Microscopy
Optical microscopy uses optic principles to provide detailed images of samples. Antonie van Leeuwenhoek designed the first compound optical microscope in the 17th century to visualize blood cells, bacteria, and yeast cells. In 1830, Joseph Jackson Lister created an essentially modern light microscope. The 20th century saw the development of microscopes with enhanced magnification and resolution.
In optical microscopy, the specimen to be viewed is placed on a glass slide and clipped on the stage...
In optical microscopy, the specimen to be viewed is placed on a glass slide and clipped on the stage...
Confocal Fluorescence Microscopy
Confocal microscopy is an advanced microscopic technique. The prime advantage of the confocal microscope over other microscopy techniques is its ability to block the out-of-focus light from the illuminated samples using pinholes. It is widely used with fluorescence optics to obtain high-resolution, sharp contrast images. Unlike optical microscopes, confocal microscopes use a focused beam of light laser to scan the entire sample surface at different z-planes. These microscopes are, therefore,...


