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晶度对氧化薄膜的机械性能和氧化抵抗的影响

Luís F S Sabino¹, Paula L L Araújo¹, Fábio S Oliveira¹

¹Universidade Federal de Sergipe, Av. Marcelo Deda Chagas, São Cristóvão, Sergipe 49107-230, Brasil.

|December 22, 2025

概括

结晶性提高了氧化 (Zr-Si-N) 薄膜的硬度. 然而,具有高含量的无形结构对于在高温下具有优越的氧化抵抗是至关重要的.

科学领域:

材料科学材料科学材料科学
薄膜技术薄膜技术
纳米技术纳米技术

背景情况:

氧化 (Zr-Si-N) 薄膜是具有可调节性质的先进材料.
了解结构和属性之间的相互作用是优化其性能的关键.

研究的目的:

确定晶度或含量是否是控制Zr-Si-N薄膜机械和热性能的主要因素.
调查无形结构与晶体结构对硬度和氧化抵抗的影响.

主要方法:

Zr-Si-N薄膜的编码定位通过在不同温度下进行反应磁铁子喷射.
使用拉瑟福反射光谱法 (RBS),用场发射枪 (SEM-FEG) 扫描电子显微镜,草地发射X射线衍射 (GIXRD),纳米硬度测试和高温氧化测试进行表征.

主要成果:

结晶Zr-Si-N薄膜与含量较低的薄膜相比,显示出更好的方向和更小的结晶体大小.
与无形Zr-Si-N膜相比,结晶导致硬度增加了35%以上.
含有高的无形Zr-Si-N薄膜表现出高达600°C的优异氧化耐受性,而晶体薄膜则失败了.

结论:

结晶性显著提高了Zr-Si-N薄膜的机械硬度.
高含量与无形结构相结合,对于在Zr-Si-N薄膜中实现优越的氧化阻力至关重要.

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