非常高放大率和小漂移的MEMS重力仪的直流读出电子器件
Alejandro Sandoval1, Roberto Hinojosa1, Daniel Teran1
1Instituto de Física, Universidad Autónoma de San Luis Potosí, SLP 78295, Mexico.
The Review of scientific instruments
|December 24, 2025
概括
本研究介绍了基于微电子机械系统 (MEMS) 的引力计的电子电路. 该电路增强信号放大以达到μGal的精度,而不会影响动态范围或增加热漂移.
科学领域:
- 物理 物理学 物理
- 工程 工程师 工程师 工程师
- 仪器化 仪器化 仪器化
背景情况:
- 基于微电子机械系统 (MEMS) 的重力计提供了可在现场部署的重力测量解决方案.
- 一些MEMS重力计的读数包括通过象限探测器信号变化测量质量位移.
- 为了达到微加 (μGal) 精度,需要非常高的信号噪声比.
研究的目的:
- 为MEMS重力计提供设计用于增强信号放大功能的电子电路.
- 通过改善信号噪声比来实现更高精度的测量.
- 为了保持传感器的全部动态范围,避免引入额外的热漂移.
主要方法:
- 开发一种用于重力计信号处理的新型电子电路.
- 在电子电路内实施连续偏移移除技术.
- 测试和验证电路在增强信号放大方面的性能.
主要成果:
- 开发的电子电路成功实现了增强的信号放大.
- 该电路可以在不减少传感器动态范围的情况下进行更高精度的测量.
- 电子电路没有引入任何额外的热漂移.
结论:
- 提出的电子电路是提高MEMS重力计性能的有效解决方案.
- 这一进步有助于在现场应用中实现μGal级别的精度.
- 电路设计提供了一种强大的方法来提高敏感仪器仪表中的信号质量.
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