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Updated: Jan 7, 2026

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用于MPT的AI辅助复合蚀刻模型

Yanbin Gong1, Fengsheng Zhao1, Devin Sima2

  • 1Dongfang Jingyuan Electron Co., Ltd., Beijing 100176, China.

Micromachines
|December 31, 2025
PubMed
概括

本研究介绍了一种人工智能辅助的先进半导体光刻模型,改进了蚀刻轮模拟和热点检测,在复杂的造电路中使用石刻-石刻-石刻-石刻过程.

关键词:
欧洲经济合作委员会 (ERC) 是一个机构.这是一个小小的,小小的,小小的.这是一个SARP.这就是SEM轮.自动重定位自动重定位刻模型模型的模型.热点检测 热点检测 热点检测多个模式的多重模式.

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When proton-coupled carbon-13 spectra are simplified by a broadband proton decoupling technique, structural information about the coupled protons is lost. Distortionless enhancement by polarization transfer (DEPT) is a technique that provides information on the number of hydrogens attached to each carbon in a molecule. While the DEPT experiment utilizes complex pulse sequences, the pulse delay and flip angle are specifically manipulated. The resulting signals have different phases depending on...
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