用多项式点互波拼接方法分析电热执行器的行为
Yujuan Tang1, Aidong Qi2, Yuanhu Gu3,4,5
1School of Intelligent Science and Control Engineering, Jinling Institute of Technology, Nanjing 211169, China.
本研究介绍了多项式点间波拼接方法 (PPCM) 用于分析V形微型执行器. 与FEM和实验相比,PPCM准确地预测电热和热力学行为,显示最小的温度和位移误差.
科学领域:
- 计算力学是计算力学.
- 微型执行器分析
- 电热-热力机械合器
背景情况:
- V 形微型执行器是微电子机械系统 (MEMS) 中的关键组件.
- 准确分析它们的合电热和热力学行为对于性能优化至关重要.
- 现有的方法在有效处理涉及的复杂物理方面可能面临挑战.
研究的目的:
- 为分析V形微型执行器提供多项式点插值配置方法 (PPCM) 的新实施方案.
- 验证PPCM在预测合电热和热力学反应方面的能力.
- 根据有限元法 (FEM) 和实验数据评估PPCM的准确性.
主要方法:
- 使用PPCM进行热传递和结构力学规则方程的分离.
- 通过增量负载方法实现离散电热系统的完全合解决方案.
- 解决离散机械方程,结合自然边界条件来计算位移.
主要成果:
- 射线基函数MQ表现出与参数pa=1和pq=1.8.8的良好收.
- 与FEM相比,PPCM在6V电压下显示的温度差距小于1°C.
- 与实验温度数据相比,PPCM表现出大约10%的误差 (20°C差异).
- 在PPCM和FEM之间的位移误差在12V应用电压下低至2μm.
结论:
- 多项式点插值配置方法 (PPCM) 是一种经过验证和有效的数值技术.
- PPCM准确地预测了V形微型执行器的合电热和热力学行为.
- 该方法显示出对分析微型执行器的驱动特性具有高准确性的有希望的潜力.
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