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Updated: Jan 13, 2026

Preparation and Observation of Thick Biological Samples by Scanning Transmission Electron Tomography

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Published on: March 12, 2017

大量的"碎片"被提出来进行3D断层分析,使用分析性等离子体聚焦离子束扫描电子显微镜

Ruth Birch¹, Shuheng Li¹, Sharang Sharang²

¹Department of Materials Engineering, UBC, Vancouver, Canada.

Micron (Oxford, England : 1993)

|January 7, 2026

概括

本研究介绍了一种使用等离子聚焦离子束扫描电子显微镜 (FIB-SEM) 和电子反射散射衍射 (EBSD) 的3D材料分析方法. 该技术使材料结构和变形的详细表征成为可能,以改进材料设计和建模.

科学领域:

材料科学材料科学材料科学
材料的特性材料的特性
电子显微镜电子显微镜

背景情况:

3D材料的表征对于材料设计和建模至关重要.
了解谷物结构和变形模式需要先进的分析技术.

研究的目的:

为特定站点提供一个工作流程,大体积的3D连续切割优化用于晶体分析.
在纯样本上使用3D电子反射散射衍射 (EBSD) 演示该工作流的应用.

主要方法:

特定于现场的大容量"碎片"提升技术.
使用等离子 (Xe) 聚焦离子束扫描电子显微镜 (等离子FIB-SEM) 进行3D串行切割.
优化了"静态"配置,用于没有样本移动的电子反射散射衍射 (EBSD) 分析.

主要成果:

成功地对纯多晶印记进行了3D晶体分析.
对实质性材料体积 (例如200 × 200 × 400 μm3) 适用的工作流程的演示.

结论:

展示的升降和3D连续切割工作流程可以进行详细的材料表征.
该方法适用于各种材料,并为进入该领域的研究人员提供指南.

关键词:

3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D EBSD 3D特征表征 3D特征表征电子显微镜的电子显微镜是的重要组成部分.纳米印花的使用方法这就是SEM SEM.

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