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五秒激光非衍射束光刻法通过相调节用于介电金属表面制造.

Weina Han1,2, Kailin Zhao1,2, Donghui Wei1,2

  • 1Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing, China.

Advanced materials (Deerfield Beach, Fla.)
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概括

一种新的 femtosecond 激光光刻技术能够精确地制造大面积的介电变相元面. 这一突破使可编程光控制和具有高均性和选择性的先进光子设备成为可能.

关键词:
介电变电器的表面变电.制造 制造 制造 制造 制造五秒激光激光器是如何使用的石版印刷 石版印刷 石版印刷模块化调制的方法不散射光束的非散射光束.

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科学领域:

  • 光电学是指光电子产品.
  • 材料科学 材料科学 材料科学
  • 纳米技术纳米技术

背景情况:

  • 介电变相元表面提供可编程的光控制,但面临着制造方面的挑战.
  • 目前的方法难以实现大面积的统一性,精度和个体元原子调制.

研究的目的:

  • 引入一种新的制造技术,以克服相变金属表面制造的局限性.
  • 为了证明高精度,大面积制造可调节的元表面.

主要方法:

  • 开发了秒 (fs) 激光相调节非衍射束光刻 (PNDL).
  • 利用叠加的轴子和燃烧的格子相来创建一个准贝塞尔非衍射束.
  • 通过化学处理voxel元表面,实现了无面膜光刻.

主要成果:

  • 使用PNDL制造了一个可调整的Ge$_{2}$Sb$_{2}$Te$_{5}$元表面,具有9nm的特征大小.
  • 证明了动态光束偏移控制,精度为7nm.
  • 成功制造和调制多功能可编程光子逻辑设备.

结论:

  • PNDL为活跃的地表制造和调制提供了一个新的范式.
  • 这种技术使相变元表面的高均性,高精度制造成为可能.
  • 为下一代光电子和光子设备铺平了道路.