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相关概念视频

Electronic Distance Measuring Instruments01:30

Electronic Distance Measuring Instruments

453
Electronic Distance Measuring Instruments (EDMs) are essential tools in modern surveying, offering precise distance measurements by emitting electromagnetic signals and calculating the time required for these signals to travel to a target and return. Two primary types of signals are used in EDMs — light waves and microwaves — each suited to specific environmental and distance requirements. Light-wave-based EDMs utilize either infrared or laser light, providing high accuracy over...
453

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用于检测子波长横向移位的元装置.

Shufan Chen1, Yubin Fan2, Hao Li3

  • 1Department of Electrical Engineering and State Key Laboratory of Optical Quantum Materials, City University of Hong Kong, Kowloon, Hong Kong SAR, 999077, China.

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我们开发了一种新的二光子状态横移测量方法,用于石版. 这种技术通过显著减少检测到的光子实现了同等的精度,提高了测量速度和适用于半导体制造的适用性.

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科学领域:

  • 计量学 计量学 计量学
  • 光学物理学 光学物理学
  • 纳米技术 纳米技术

背景情况:

  • 准确的横向位移测量对于半导体光刻学中精确的面膜到晶圆定位至关重要.
  • 现有的横移计量方法在现场速度和精度方面面临挑战,原因是连贯状态和格子限制.

研究的目的:

  • 引入一种新的两光子状态横移测量方法.
  • 为了提高半导体光刻应用的测量速度和精度.

主要方法:

  • 使用极化梯度的超表面和两光子状态干扰.
  • 将新方法的性能与传统的测量技术进行比较.

主要成果:

  • 双光子状态方法实现了与经典方法相当的精度,同时将检测到的光子减少到大约3%.
  • 已证明适用于集成到半导体光刻工艺中的适用性.

结论:

  • 双光子极化态梯度超表面方法为下一代横向移位测量提供了强大的解决方案.
  • 这种方法可以在显著更短的采集时间内实现同等的测量精度.