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Updated: Jan 22, 2026

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通过边缘偏差电压和结构阻抗变化在矩形电压波形中提高HARC蚀刻的均性

Chanho Park1,2, Jinill Cho3,2, Junghwan Um2

  • 1Department of Semiconductor and Display Engineering, Sungkyunkwan University, Suwon, 16419, South Korea.

Scientific reports
|January 20, 2026
PubMed
概括

应用分离的直流边缘偏差可以提高半导体制造的等离子蚀刻统一性. 这种方法通过控制等离子体外潜力来提高蚀刻精度和产量,尽管高电压存在挑战.

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The movement of electrons in a conductor requires some form of energy or work, usually provided by an external force, like a battery. This force is called the electromotive force or voltage. The voltage between two points, referred to as points "a" and "b," in an electric circuit is the energy (or work) needed to move a unit charge from point "a" to point "b," and this relationship is expressed mathematically as
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A three-phase generator produces three voltages that are equal in magnitude but have a phase difference of 120 degrees. This identical magnitude and equal phase separated voltages are known as the balanced voltages and help to minimize power loss while ensuring a steady delivery of energy to connected loads. As voltage sources in a three-phase system can be configured in a wye or a delta formation, the loads connected to these systems can also be arranged in either configuration. This...
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Generally, a single battery is not enough to power some devices. In such cases, batteries can be combined in two ways: in series or in parallel.
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Generator voltage control is crucial for maintaining the stable operation of synchronous generators and wind turbines. In older models, a DC generator driven by the rotor delivers DC power to the rotor's field winding, and the power is transferred through slip rings and brushes. In the latest models, static or brushless exciters are used. Static exciters rectify AC power from the generator terminals and then transfer the DC power directly to the rotor. Brushless exciters, on the other hand, use...
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