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Updated: Jan 24, 2026

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超薄的氧化物集成用于二维功能电子设备的二维功能电子设备

Jingyu Mao1,2, Xiangyu Hou3, Wei Zhang3

  • 1School of Humanities and Fundamental Sciences, Shenzhen University of Information Technology, Shenzhen 518172, China.

ACS applied materials & interfaces
|January 23, 2026
PubMed
概括

一种新方法将高质量的氧化 (HfOx) 介电材料集成到石墨烯上,使用HfS2的热氧化. 这种方法可以实现高性能二维 (2D) 电子,包括晶体管和电阻开关设备.

关键词:
两维晶体管的二维晶体管氧化甲氧化物 氧化甲高κ介电介电材料的使用电阻开关 电阻开关范德瓦尔斯的整合

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