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Updated: Jan 25, 2026

Manufacturing Simple and Inexpensive Soil Surface Temperature and Gravimetric Water Content Sensors
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自动加热的自上而下制造的ITO传感器用于准确监测ppb级O3

Xiaohua Ji1,2, Meng Li3, Ruoqing Zhang1,2

  • 1Anhui Provincial Key Laboratory of Photonic Devices and Materials, Anhui Institute of Optics and Fine Mechanics, Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei 230031, China.

Nano letters
|January 23, 2026
PubMed
概括

研究人员开发了一种新方法,使用玻璃上的氧化物 (ITO) 制造高性能臭氧 (O3) 传感器. 这种方法可以在晶圆尺度上生产可靠的传感器,以精确实时监测环境臭氧水平.

关键词:
在 ITO 传感器上.臭氧层的监测是对臭氧层的监测.自加热的自加热器上下制造 制造上下制造

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