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设计和优化用于射频应用的AlGaN/AlN/GaN L-SBD
Shaikshavali Dudekula1, Nilesh Kumar Jaiswal2, Thomas Ebel2
1Department of Electronics and Communication Engineering, QIS College of Engineering and Technology, Ongole 523 272, India.
ACS omega
|January 26, 2026
概括
将薄薄的化 (AlN) 介层添加到化 (GaN) 侧面的Schottky屏障二极管 (L-SBD) 中,可以显著提高射频 (RF) 性能. 这种增强使得这些设备非常适合用于高频应用.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 半导体物理 半导体物理
背景情况:
- 在高频应用中,侧面的舒特基屏障二极管 (L-SBD) 是至关重要的.
- 在AlGaN/GaN异构结构中优化载体封闭是提高设备性能的关键.
- 由于载体传输和接口特性,现有的L-SBD在RF优点数据方面面临限制.
研究的目的:
- 研究AlGaN中间层对AlGaN/GaN L-SBD射频性能的影响.
- 分析变化的AlN介层厚度如何影响设备特性.
- 通过接口工程来增强载体封闭和射频指标.
主要方法:
- 用不同厚度 (1-3 nm) 的AlN介层制造和表征L-SBD.
- 电气和动态行为分析,包括电流传输和电容测量.
- 对实验数据进行模拟模型的开发和校准,以了解物理机制.
主要成果:
- 一个优化的3纳米AlN介层增加了极化诱导的电荷,增强了载体度和移动性.
- 优化的设备显示前向电流 (630 mA/mm) 提高了9%.
- 在切断频率 (14.11%增加至0.283 THz),动态导电性 (10%提高至310 mS/mm) 和电压灵敏度 (90%改善至1180 mV/mW) 中观察到显著改善.
结论:
- 该AlN介层有效地增强载体封闭,并减轻合金散射.
- 优化的基于GaN的L-SBD与AlN间层显示出卓越的射频性能.
- 这些设备对于高频探测器和微波混合器应用非常有前途.
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