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设计和视觉伺服控制的三轴压柔性微型/纳米操纵器与抑制的合运动
Buyun Chen1, Xiaomeng Cui1, Zhaoxin Lian1
1Robotics Institute, School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China.
The Review of scientific instruments
|January 26, 2026
概括
本研究介绍了一种双阶段纳米操纵器,用于精确的微/纳米操纵,通过脱的运动控制显著减少定位错误. 视觉传感可实现实时补偿,在复杂的应用中实现高精度.
科学领域:
- * 精密工程和纳米技术
- * 机器人和控制系统
背景情况:
- * 基于合规机制的阶段对于微/纳米操纵至关重要.
- * 多轴系统中的交叉合运动会导致严重的定位错误.
- *现有系统需要改进解运动控制的方法.
研究的目的:
- * 开发一种基于视觉传感的兼容双阶段纳米操纵器,用于解的运动控制.
- *为了最大限度地减少精确定位阶段的交叉合错误.
- * 为了展示实时运动补偿能力.
主要方法:
- *使用对称的四条曲机制设计XY和Z阶段.
- * 负载-位移关系的理论分析和最大硬度的优化.
- * 实施视觉传感系统,用于位置测量和闭环控制.
- * 使用压电驱动器驱动阶段.
主要成果:
- * 实现了良好的脱性能,交叉合误差低于0.4% (XY) 和0.7% (Z).
- * 通过视觉伺服控制证明了动作错误的实时补偿.
- *成功制造了一个微滴子阵列,展示了系统的能力.
结论:
- *开发的纳米操纵器有效地实现了精确定位的脱运动控制.
- *视觉传感和闭环控制对于实时错误补偿至关重要.
- * 该系统对先进的微/纳米操纵任务表现有前途.
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