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相关概念视频

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相关实验视频

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Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS
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晶圆级自组装和接口被动化图案技术用于纳米材料兼容的3D MEMS传感芯片.

Zheng Zhang1, Yanlin Zhang1, Yuanyuan Luo2

  • 1School of Integrated Circuits, Huazhong University of Science and Technology, Wuhan, 430074, People's Republic of China.

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概括

一个新的晶圆级制造工艺使纳米材料能够集成到微电机系统 (MEMS) 中,用于高性能化学传感. 这一突破有助于在8英寸晶圆上可靠制造先进的MEMS传感器.

关键词:
兼容的制造 兼容的制造接口被动化模式技术的接口.在MEMS MEMS中使用.感应芯片的感应芯片晶圆级自组装自组装器

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科学领域:

  • 材料科学与工程 材料科学与工程
  • 纳米技术纳米技术
  • 微电机系统 (MEMS) 是指微电机系统.

背景情况:

  • 高性能MEMS生物/化学传感芯片的晶圆规模制造受到将纳米材料集成到悬浮MEMS架构中的困难的限制.
  • 现有的方法在可靠的模式和功能传感薄膜集成到MEMS设备上扎,特别是那些需要抵抗强化学品的设备.

研究的目的:

  • 开发使用纳米材料的高性能MEMS传感芯片的晶圆级制造战略.
  • 为了克服MEMS制造中的功能传感膜和基板之间的不兼容性.
  • 为基于纳米材料的耐四甲基氧化物MEMS传感器建立一个可靠和可扩展的工艺.

主要方法:

  • 实施了一种"首先是薄膜,然后是悬臂"的晶圆级制造方法.
  • 动力控制的自组装被用来将湿化学合成的Pd/SnO2纳米球作为密集的,均的单体薄膜转移到8英寸晶圆上.
  • 采用HfO2接口被动化图案技术,用于精确的图案设计和集成到悬挂的MEMS支架上.

主要成果:

  • 在8英寸晶圆上成功制造了Pd/SnO2 MEMS H2芯片.
  • 在制造的MEMS传感器的性能中表现出高灵敏度和一致性.
  • 克服了在晶圆层形成和高性能纳米材料薄膜的图案化方面的挑战.

结论:

  • 开发的晶圆级制造战略重新定义了MEMS传感芯片的工艺流程.
  • 这种方法使功能纳米材料可靠地集成到悬浮MEMS架构中.
  • 该过程具有可扩展性,适用于生产耐四甲基氧化纳米材料的MEMS传感芯片.