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Updated: Jan 28, 2026

Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS
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晶圆级自组装和接口被动化图案技术用于纳米材料兼容的3D MEMS传感芯片

Zheng Zhang1, Yanlin Zhang1, Yuanyuan Luo2

  • 1School of Integrated Circuits, Huazhong University of Science and Technology, Wuhan, 430074, People's Republic of China.

Nano-micro letters
|January 26, 2026
PubMed
概括

一个新的晶圆级制造工艺使纳米材料能够集成到微电机系统 (MEMS) 中,用于高性能化学传感. 这一突破有助于在8英寸晶圆上可靠制造先进的MEMS传感器.

关键词:
兼容的制造 兼容的制造接口被动化模式技术的接口.在MEMS MEMS中使用.感应芯片的感应芯片晶圆级自组装自组装器

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