在GAA NSFET的内部间隙腔形成中应用多种干蚀刻技术的特征比较和过程优化
Meng Wang1,2, Xinlong Guo1, Ziqiang Huang1
1College of Integrated Circuits and Micro-Nano Electronics, Fudan University, Shanghai 200433, China.
Nanomaterials (Basel, Switzerland)
|January 27, 2026
概括
气体蚀刻为Gate-all-around纳米板场效应晶体管 (GAA NSFET) 的内部间隔器制造提供了卓越的SiGe/Si选择性. 这种先进的工艺尽量减少损坏,使设备性能优化和未来制造的关键见解成为可能.
科学领域:
- 材料科学与工程 材料科学与工程
- 半导体设备制造业 半导体设备制造业
背景情况:
- 内部间距模块对于Gate-all-around纳米板场效应晶体管 (GAA NSFET) 的性能至关重要.
- 对于先进的逻辑设备来说,内部间隔器制造的系统优化和创新是必要的.
研究的目的:
- 开发一种先进的- (SiGe) 蚀刻工艺,用于GAA NSFET中理想的内部间隔结构.
- 评估和比较三个干蚀技术:感应合等离子 (ICP),远程等离子源 (RPS) 和气蚀.
主要方法:
- 在相同的条件下对ICP,RPS和气体蚀刻进行SiGe内部间隙腔蚀刻的比较分析.
- 系统地优化预清洁条件,温度和气体蚀刻的室内压力.
主要成果:
- 气体蚀刻显示出显著更高的SiGe/Si选择性 (约9倍的ICP,约2倍的RPS).
- 优化气蚀实现了~56的平均SiGe/Si选择性,0.92的内部间隔形状指数和最小的蚀刻变化 (0.65 nm).
- 气蚀证明最适合最小化Si纳米板损伤,因为它的高SiGe选择性.
结论:
- 气蚀是高选择性SiGe蚀刻在GAA NSFET内部间距制造中的首选技术.
- 这些发现为GAA NSFET制造过程中的工艺模块开发和设备选择提供了关键的见解.
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