DRIE

Dandan Wang1, Cheng Lei1, Pengfei Ji1

  • 1State Key Laboratory of Widegap Semiconductor Optoelectronic Materials and Technologies, North University of China, Taiyuan 030051, China.

Micromachines
|January 28, 2026
PubMed
概括

深度反应离子蚀刻 (DRIE) 过程参数被优化,以改善微加工中的侧墙角和面积比控制. 动态底部射频功率调整和被动化到蚀刻时间比率是高精度制造的关键.

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