兼容CMOS的微型光伏发电机与后处理增强光学吸收
Hung-Wei Chen1, Chi-Yuan Lee2, Ching-Liang Dai3
1Powerchip Semiconductor Manufacturing Corporation, Miaoli 366, Taiwan.
Micromachines
|January 28, 2026
概括
研究人员使用CMOS技术开发了一台微光伏发电机 (MPG). 这种电网结构的设备显著提高了潜在的电力应用的光能转换效率.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 半导体物理 半导体物理
背景情况:
- 微型光伏发电机 (MPG) 对于收集光能至关重要.
- 标准的CMOS技术为制造这些设备提供了一个可扩展的平台.
- 优化接口设计和光学合是提高MPG性能的关键.
研究的目的:
- 使用标准的0.18微米CMOS技术设计和制造基于的MPG.
- 通过网格结构的架构来增强光电流的产生.
- 通过CMOS后处理来改善光学合并减少反射损失.
主要方法:
- 使用0.18微米CMOS工艺制造MPG.
- 在n-well中实现一个带有图案的p型区域的网格结构架构.
- 应用CMOS后的湿蚀刻工艺来去除二氧化层.
主要成果:
- MPG具有类似网格的p-n连接网络,扩大了连接区域并增强了载体收集.
- 后CMOS处理有效地去除了介电层,使光子能够直接透并最大限度地减少反射.
- 在1000W/m2的照明下,该设备实现了0.49V的开通电压,239μA的短路电流,90μW的最大功率.
- 记录了12.9%的整体能量转换效率.
结论:
- 网格结构的连接设计有效地提高了光电流的产生.
- 处理后去除介电层可以显著提高光学合和设备性能.
- 制造的MPG表现出高效率,验证了综合设计和制造方法.
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