五轴精密配送机的设计和基于视觉的校准
Ruizhou Wang1, Jinyu Liao1, Binghao Wang1
1State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, China.
Micromachines
|January 28, 2026
概括
本研究引入了一种基于视觉测量 (VBM) 系统,用于识别五轴精密配剂机的几何误差. 该系统可实现自动校准,提高半导体包装的准确性.
科学领域:
- 机械工程 机械工程
- 机器人技术 机器人技术 机器人技术
- 计量学 计量学 计量学
背景情况:
- 五轴精密配剂机对于半导体包装至关重要.
- 这些机器中的几何错误显著影响了配剂的准确性.
- 现有的校准方法可能是复杂和耗时的.
研究的目的:
- 提出基于视觉测量 (VBM) 系统,用于识别和校准五轴配剂机的几何误差.
- 开发用于动力学校准和工件检测的自动化解决方案.
- 提高半导体包装工艺的整体准确性和可靠性.
主要方法:
- 建立了一个动力学模型,使用螺丝理论的指数乘积公式.
- 设计了一个几何错误识别算法,包括位置独立的几何错误 (PIGEs) 和位置依赖的几何错误 (PDGEs).
- 采用单数值分解和规则化来解决过度确定方程,并在A和C轴上识别PIGEs.
主要成果:
- 在A和C轴上,VBM系统成功识别了8个PIGE.
- 测量的平均空间位置误差为59.9微米,平均方向误差为160弧秒.
- 通过全面的错误测量验证了拟议的方法.
结论:
- VBM系统为五轴精密配送机提供了可行和自动化的校准解决方案.
- 开发的方法有效量化了几何误差,这对于高精度应用至关重要.
- 这种方法有助于提高半导体包装的精度.
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