Ni/β-Ga2O3的光导增益行为 基于肖特基屏障二极管的紫外线探测器
Viktor V Kopyev1, Nikita N Yakovlev1, Alexander V Tsymbalov1
1Research and Development Centre for Advanced Technologies in Microelectronics, National Research Tomsk State University, 634050 Tomsk, Russia.
Micromachines
|January 28, 2026
概括
这项研究详细介绍了一种新的/β-氧化物Schottky屏障二极管,它对深紫外线具有很高的敏感性,用于先进的光电探测器应用.
科学领域:
- 材料科学 材料科学 材料科学
- 半导体物理 半导体物理
- 光电学是指光电子产品.
背景情况:
- 氧化 (Ga2O3) 是一个有前途的宽带间隙半导体,用于功率电子和光电子.
- 肖特基阻隔二极管是各种电子和光电子设备中的关键组件.
- 深紫外线 (DUV) 光探测器需要具有特定带隙特性的材料来进行选择性检测.
研究的目的:
- 为了制造和描述一个垂直的Ni/β-Ga2O3 Schottky阻隔二极管.
- 为了研究制造的设备的光响应机制和性能.
- 评估其在深紫外线 (DUV) 检测应用中的潜力.
主要方法:
- 在散装 (-201) 导向的β-Ga2O3单晶上制造一个垂直的Ni/β-Ga2O3 Schottky阻隔二极管.
- 电气特性包括电流-电压 (I-V) 测量以确定设备参数.
- 在深紫外线 (DUV) 照明下进行光学表征,以评估光响应,响应性和检测能力.
主要成果:
- /β-Ga2O3二极管表现出极好的整正行为,其Schottky屏障高度为1.63 eV,整正比率高 (约9.7 × 10^6).
- 该设备对DUV辐射 (λ ≤280 nm) 显示出高灵敏度,最高响应度在255 nm.
- 在254nm照明下实现了自动供电的操作,证明了高效的光生成载体分离.
- 性能指标如响应能力 (高达3.87 A/W) 和检测能力 (高达4.3 × 10^11 Hz^0.5 cmW^-1) 在反向偏差下得到改善.
- 观察到高速响应 (上升/衰变时间≤59毫秒) 和显著的内部增益 (EQE高达1.8×10^3%).
结论:
- 制造的Ni/β-Ga2O3 Schottky阻隔二极管在DUV光探测器应用中表现出色.
- 该设备的自动供电操作,高响应性和快速响应时间使其适合敏感和高效的紫外线传感.
- 进一步优化可以提高要求高的光电子应用的性能.
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