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MCHB-DETR:对于半导体包装中的喷墨打印缺陷的高效和轻量级检查框架
Yibin Chen1, Jiayi He1, Zhuohao Shi1
1School of Mechanical and Electrical Engineering, Guangdong University of Technology, Guangzhou 510006, China.
Micromachines
|January 28, 2026
概括
一个新的缺陷检测框架,MCHB-DETR,改善了半导体包装中的喷墨打印质量. 它有效地识别了微妙的缺陷,如缺失的滴滴,提高了产品产量和设备可靠性.
科学领域:
- 半导体制造业 半导体制造业
- 微电子包装 微电子包装
- 先进材料的沉积先进材料的沉积.
背景情况:
- 喷墨打印对于半导体包装至关重要,但缺少滴水和喷等动态缺陷会降低可靠性.
- 现有的检查方法无法有效检测微妙的,低对比度的缺陷.
研究的目的:
- 开发一个轻量级缺陷检测框架,MCHB-DETR,以提高半导体包装喷墨印刷的产品产量.
- 解决传统检查方法在识别动态打印缺陷方面的局限性.
主要方法:
- 提出了MCHB-DETR,这是一个基于RT-DETR的新型轻量化框架.
- 实现了一个轻量级的骨干,增强了多层次的特征提取.
- 设计了一种混合编码器,以改进跨尺度和多频特征的融合.
主要成果:
- 实现了参数减少29.1%,FLOP减少36.7%.
- 提高了平均精度 (mAP@50) 的3.1%和mAP@50:95的3.5%.
- 证明了卓越的检测性能和高效的推断.
结论:
- MCHB-DETR显著提高了用于半导体包装的喷墨印刷的缺陷检测.
- 该框架为提高产品产量和设备可靠性提供了一个有希望的解决方案.
- 它的轻量级设计和高效的推断使其适合于现实世界的制造应用.
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