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Updated: Jan 29, 2026

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在芯片制造背景下,反光刻法技术 (ILT)

Xiaodong Meng1,2, Cai Chen2, Jie Ni2

  • 1School of Integrated Circuits, Tsinghua University, Beijing 100084, China.

Micromachines
|January 28, 2026
PubMed
概括

逆光刻技术 (ILT) 为先进的芯片制造提供了卓越的图案准确性和适应性,克服了传统光学近距离校正 (OPC) 的局限性. 本综述系统地总结了ILT.

关键词:
计算 lithography 的使用方法.反向光刻技术的反向光刻技术模式忠诚度 模式忠诚度 模式忠诚度过程窗口是一个过程窗口.

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