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低成本DLW设置用于制造光子学集成电路
André Moreira1, Alessandro Fantoni1,2, Miguel Fernandes1,2
1Departamento de Engenharia Electrónica e Telecomunicações e de Computadores, Instituto Superior de Engenharia de Lisboa (ISEL), 1959-007 Lisboa, Portugal.
Micromachines
|January 28, 2026
概括
本研究介绍了一种低成本的直接激光写字系统,用于制造光子集成电路 (PIC). 该系统可实现快速原型设计,并降低数据通信和量子计算领域的研发成本.
科学领域:
- 光子学和材料科学 材料科学
- 光电子学和纳米制造
背景情况:
- 传统的光子集成电路 (PIC) 制造复杂且昂贵,限制了研究和原型设计的可访问性.
- 高成本和对专用设备的依赖阻碍了PIC技术的广泛采用.
研究的目的:
- 开发一种低成本的直接激光写作 (DLW) 系统,用于制造基于聚合物的PIC.
- 为PIC原型设计提供一种可访问和具有成本效益的解决方案,特别是用于学术和研究环境.
主要方法:
- 使用DLW系统与XY平台和聚焦激光束用于精确的基板操纵.
- 在ITO涂层玻璃基板上使用SU-8光电阻,涉及基板清洁,旋转涂层和热.
- 开发了一个自定义的用户界面和切片器来处理.dxf文件变成可执行的制造命令.
主要成果:
- 在制造的聚合物结构中达到10μm的分辨率.
- 成功地模拟了各种光子设备,包括衍射网,波导和多模干扰设备.
- 证明了该系统在PIC制造中的快速原型和降低成本的能力.
结论:
- 开发的DLW系统为PIC原型制造提供了一个可行的,低成本的替代方案.
- 这项技术提高了研究和原型设计的可访问性,可能加速数据通信,传感和量子计算方面的创新.
- 该系统的灵活性和成本效益使其适用于学术机构和研发实验室.
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