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在4H-SiC沉过程中对应力变化的研究
Wenshan Wang1, Shuixing Lin1, Yiqing Yu1,2
1College of Mechanical Engineering and Automation, Huaqiao University, Xiamen 361021, China.
这项研究模拟了碳化 (SiC) 上的磨砂颗粒缩,以了解应力效应. 增加的压力线性地增加了隙深度和应力区,但裂形成会导致波动.
科学领域:
- 材料科学 材料科学 材料科学
- 机械工程 机械工程
- 计算物理 计算物理
背景情况:
- 碳化 (SiC) 是一个在苛刻的应用中至关重要的材料.
- 了解SiC的应力损伤对于材料加工和可靠性至关重要.
- 磨削过程很常见,但可能导致地下破坏.
研究的目的:
- 为了研究压力对4H-SiC材料损坏的影响,在单磨砂剂颗粒缩过程中.
- 模拟和分析施加压力和材料响应之间的关系.
- 要了解裂的发起和在缩应力下的传播.
主要方法:
- 平滑粒子水力学 (SPH) 方法用于模拟.
- 模拟单一的磨料颗粒缩模拟.
- 实验验证缩模型的实验验证.
- 发展应力变化的数学模型.
主要成果:
- 观察到深度和施加的压力之间的线性关系.
- 受压力影响的区域随着压力在一定范围内增加而扩大.
- 裂形成导致应力受影响区域尺寸的波动.
- 在缩进过程中,确定了明显的应力分布模式.
结论:
- 施加的压力直接影响4H-SiC的入深度和应力分布.
- 裂传播显著改变了应力受影响的区域,影响了材料的完整性.
- SPH模拟为4H-SiC中的应力损伤机制提供了准确的见解.
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