基于多折叠梁和有害模式抑制结构的毫米级MEMS执行器.
Hangyu Zhou1, Wei Bian2, Rui You1
1School of Instrument Science and Optoelectronics Engineering, Beijing Information Science & Technology University, Beijing 100192, China.
Micromachines
|January 28, 2026
概括
我们开发了一种用于光学互连的新型MEMS电磁执行器. 它通过集成差分运动拒绝单元来实现大冲动和高稳定性,显著减少寄生虫运动和交叉声.
科学领域:
- 微电子机械系统 (MEMS) 是一种微电子机械系统.
- 光学工程是指光学工程.
- 执行器技术 执行器技术
背景情况:
- 模块级自由空间光学互连需要具有大冲程和高稳定性的执行器.
- 传统的折叠束驱动器面临着冲击和稳定性之间的权衡.
- 寄生式运动和交声是光学系统执行器设计的关键挑战.
研究的目的:
- 开发一个毫米级的MEMS电磁执行器,克服了冲击稳定性的权衡.
- 将差异运动拒绝 (DMR) 单元与刚性框架集成,以提高执行器性能.
- 通过建模,模拟和实验验证,系统地评估执行器的性能.
主要方法:
- 磁结构合模型,以了解电磁机械相互作用.
- 有限元模拟用于预测机械行为和优化设计.
- 冲击的实验性表征,共振频率,外平面移位,刚性和交叉声波.
- 测试光学测试以评估稳定的偏斜角度,以便在实际应用中.
主要成果:
- 在正弦驱动下实现了毫米尺度的脉冲,主要共振频率约为31 Hz.
- 使用DMR和框架,在共振时减少了约97%的外平面位移.
- 增加了50倍以上的静态Z方向刚度,并将移位交叉声率降低到0.265%.
- 通过光学测试,通过光学测试证明了约±21°的稳定偏斜角度.
结论:
- 开发的MEMS电磁执行器成功地将大冲动与高稳定性相结合.
- DMR单元和刚性框架的集成有效地抑制了寄生虫运动和交叉声.
- 这种执行器设计非常适合模块级光学互连系统,其空间和稳定性要求苛刻.
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