脉冲激光诱导层的特征与裂为SiC研磨工艺准备
Hu Li1, Yanjiao Jiang1, Yujia Yang1
1School of Mechanical Engineering and Automation, Northeastern University, Shenyang 110819, China.
Materials (Basel, Switzerland)
|January 28, 2026
概括
在研磨前对碳化 (SiC) 进行激光处理,可以减少表面损坏. 这种方法控制了地下裂,显著降低了研磨力,并改善了脆性材料的表面质量.
科学领域:
- 材料科学 材料科学 材料科学
- 制造业 工程 制造工程
- 激光处理 激光加工
背景情况:
- 表面和地下损坏在研磨过程中显著影响碳化 (SiC) 产品质量.
- 控制裂尺寸对于减轻易碎材料在研磨过程中产生的损伤至关重要.
研究的目的:
- 在研磨前分析激光照射对SiC表面的影响.
- 研究激光参数如何影响研磨力和表面质量.
- 评估激光诱导裂纹在SiC研磨中对损害控制的潜力.
主要方法:
- 坐标实验设计以系统地改变激光参数 (脉冲能量,点间距,扫描时间) 和研磨参数.
- 使用动力计监测磨削力.
- 计算特定的研磨能量.
- 测量诱导裂纹大小和表面粗度.
主要成果:
- 脉冲激光修饰使陶表面层的硬度降低了大约20%.
- 激光诱导的地下裂 (中位和辐射) 从20.4μm到54.3μm不等.
- 触角研磨力 (Ft) 降低了高达30%.
- 在表面粗度,激光功率和研磨参数之间建立了相关性.
结论:
- 激光照射有效降低SiC表面硬度,并诱导可控制的地下裂.
- 这些激光诱导的裂抑制了在研磨过程中损坏的传播.
- 使用激光诱导的裂提供了一种可行的方法来控制在研磨过程中易碎材料的表面和地下损伤.
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