拓光子晶圆共振器压力传感器在光通信范围内的压力传感器
Min Wu1,2, Zhuoxin Yang1, Hongming Fei1
1College of Physics and Optoelectronics, Taiyuan University of Technology, Taiyuan 030024, China.
Sensors (Basel, Switzerland)
|January 28, 2026
概括
这项研究引入了一种使用谷光子晶体 (VPC) 的新型光学压力传感器. 该传感器在广泛的压力检测中表现出高灵敏度,适合集成光子应用.
科学领域:
- 光子学是指光子学的使用方法.
- 材料科学 材料科学 材料科学
- 纳米技术纳米技术
背景情况:
- 光学压力传感器具有诸如高灵敏度和对干扰的免疫等优点,对于极端环境至关重要.
- 谷 photonic 晶体 (VPC) 提供缺陷免疫,单向传输,这是先进光学设备的关键特性.
- 在压力下,的折射率调制使压力感应机制成为可能.
研究的目的:
- 设计和演示使用VPC的拓环共振器压力传感器.
- 为了研究基于光通信波长范围中的共振峰值转移的压力传感能力.
- 为了评估传感器的灵敏度,透射率和紧结构,用于实际应用.
主要方法:
- 基于谷光子晶体的拓环共振器的设计.
- 对响应应加压 (0-10 GPa) 的共振峰值转移的分析.
- 传感器性能的表征,包括灵敏度和传导率.
主要成果:
- 传感器显示了共振峰值从1580nm转移到1489nm,因为压力从0到10GPa增加.
- 获得的最大检测灵敏度为24.34nm/GPa.
- 传输率始终保持在0.85以上,最高达到0.97.
结论:
- 成功开发了一种基于的紧型 (7.5μm × 6.5μm) 拓环共振器压力传感器.
- 传感器表现出高灵敏度和可靠的性能,适合在苛刻条件下进行压力测量.
- 这种传感器可以使用现有的纳米制造技术制造,它具有集成光子芯片的巨大潜力.
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