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Updated: Jan 30, 2026

Measurement of Spatial Stability in Precision Grip
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对于具有绝对横向空间精度的多个高度元表面的纳米图案方法.

Eugene J H Soh1, T Thu Ha Do1, Chee Leng Lay1

  • 1Institute of Materials Research and Engineering, Agency for Science, Technology and Research (A*STAR), Singapore 138634, Republic of Singapore.

ACS applied materials & interfaces
|January 29, 2026
PubMed
概括

研究人员开发了一种新方法,用于制造具有精确高度控制的3D纳米结构. 这种技术消除了对齐错误,使得高度精确和功能性的全介电纳米结构和元表面成为可能.

关键词:
原子力显微镜的原子力显微镜.电化学蚀刻 电化学蚀刻 电化学蚀刻平面光学是一种平面光学.metasurfaces 是一个地表.纳米制造的纳米制造

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