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Updated: Jan 31, 2026

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新兴半导体设备模型方法的概述:从设备物理到机器学习引擎.

Xufan Li1,2, Zhenhua Wu1,2, Gerhard Rzepa3

  • 1State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China.

Fundamental research
|January 30, 2026
PubMed
概括

机器学习辅助紧建模 (MLCM) 为半导体设备建模提供了一种新的方法. MLCM克服了传统的局限性,为先进的半导体技术提供了更好的设计技术协同优化 (DTCO).

关键词:
人工神经网络的人工神经网络紧型模型 紧型模型设计技术协同优化设计技术.机器学习 机器学习技术 计算机辅助设计 计算机辅助设计

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