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Updated: Feb 1, 2026

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Fabrication of Spatially Confined Complex Oxides
Published on: July 1, 2013
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高带宽 1060nm VCSEL 设计,混合埋藏道连接和氧化物限制
Optics letters
|January 30, 2026
概括
我们为1060nm垂直腔表面发射激光器 (VCSELs) 开发了一种新的混合封闭结构. 这种设计提高了速度和热管理,以实现高效的光学互连.
科学领域:
- 光电学是指光电子产品.
- 半导体设备 半导体设备
- 光学通信是指光学通信.
背景情况:
- 1060nm垂直腔表面发射激光器 (VCSEL) 对于光学互连非常重要,因为其分散和传输损失较低.
- 传统的氧化物封闭VCSEL遭受热积累和寄生效应,限制性能.
研究的目的:
- 提出和数值建模具有混合封闭结构的高速1060nmVCSEL.
- 为改善光学互连解决传统氧化物受限VCSELs的局限性.
主要方法:
- 在混合封闭设计中,将埋藏的道连接点 (BTJ) 与氧化物孔的整合.
- 优化BTJ位置偏移 (8nm) 以提高设备性能.
- 数字建模以评估调制带宽,差异电阻,侧模式抑制比率和热特性.
主要成果:
- 实现了37.2 GHz的3dB调制带宽.
- 证明了低差电阻 (~65Ω) 和高侧模式抑制比率 (>50 dB).
- 预计峰值温度下降超过10K,这表明热管理得到了改进.
结论:
- 拟议的混合封闭结构为下一代VCSEL提供了一个有前途的方法.
- 这种设计可以实现节能,高速,短距离的光通信系统.
- 集成的BTJ和氧化物开口增强了电流注入,降低了寄生电容,并提高了热性能.
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