设计和分析高精度X射线镜子曲器,用于合肥先进照明设施的柯克帕特里克-贝兹镜子系统
Shuaikang Jiang1, Zimeng Wang1, Shuai Zhao1
1National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China.
The Review of scientific instruments
|February 2, 2026
概括
为合肥先进照明设施设计了一种新型的镜子.
科学领域:
- 视觉机械工程 视觉机械工程
- 同步子辐射技术技术
背景情况:
- 合肥先进光设施的BL04光线线需要微焦点来进行先进的实验.
- 柯克帕特里克-贝兹镜像系统用于后聚焦,要求精确的镜像形状.
研究的目的:
- 设计和优化一个高精度的镜子曲器,用于动态圆镜形状.
- 为了满足同步发射机设施的各种实验站的聚焦要求.
主要方法:
- 整合曲机制模块的光机械设计.
- 可变镜像配置优化,以实现高表面精度.
- 用于性能验证的有限元分析和模拟.
主要成果:
- 成功设计了一种镜子曲器,能够将500毫米平面镜子塑造成圆形,弧度半径为400米.
- 在光发射电子显微镜站的曲镜面上实现了7.2nrad (rms) 的剩余斜率误差.
- 评估了加工,组装和基板错误对表面精度的影响.
结论:
- 开发的镜器满足了合肥先进照明设施微聚焦的严格要求.
- 该研究为镜子制造提供了关键容忍要求.
- 光机械设计可以作为未来工程项目的宝贵参考.
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