-,8nm

Jian Wei1, Ni Zhen1, Zuohu Zhou1

  • 1Institute of Modern Optics, Tianjin Key Laboratory of Micro-scale Optical Information Science and Technology, Nankai University, Tianjin, P. R. China.

概括

我们开发了新型的氧集群 (TOCs),用于高NA EUV光刻. 这项创新实现了具有增强粘合力的8nm以下图案,为光电阻性能设定了新的基准.

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