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Updated: Feb 7, 2026

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
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Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding

Published on: January 9, 2014

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通过使用H2S硫化并随后结晶的MoOx的转化,控制厚度和高均性的MoS2的晶圆尺度形成

Naoya Okada1, Shinichi Tanabe2, Hitoshi Miura3

  • 1Semiconductor Frontier Research Center, National Institute of Advanced Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, 305- 8568, Ibaraki, Japan. okada-naoya@aist.go.jp.

Scientific reports
|February 5, 2026
PubMed
概括

一种新的三步转换 (3SC) 方法使得在晶圆尺度基板上可扩展合成均,厚度控制的二硫化 (MoS2) 薄膜. 这一过程提高了先进电子产品的结晶性和均性.

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