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Updated: Feb 7, 2026

Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition
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作为高性能TiO2基于DRAM电容器的接口控制层,合MoO2膜的原子层沉积

Jae Hyeon Lee1, Bo Keun Park2, Taek-Mo Chung2

  • 1Department of Materials Science and Engineering, Seoul National University of Science and Technology, Seoul 01811, Republic of Korea.

ACS applied materials & interfaces
|February 6, 2026
PubMed
概括

通过原子层沉积 (ALD) 生长的新型Sn嵌入的MoOx (TMO) 薄膜,增强动态随机访问内存 (DRAM) 电容器. 这些TMO膜作为接口控制层 (ICL),改善容量和减少下一代内存设备的泄漏电流.

关键词:
在DRAM电容器的电容器.含有Sn的MoO2二氧化碳.在TiO2的过程中,TiO2原子层沉积的原子层沉积.接口控制层是接口控制层.

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