在亚2nm节点纳米板晶体管中进行载体映射,具有扫描扩散电阻显微镜
Andrea Pondini1,2, Pierre Eyben1, Lennaert Wouters1
1IMEC vzw, Leuven, Belgium.
Small methods
|February 11, 2026
概括
先进的扫描扩散电阻显微镜 (SSRM) 现在为下一代晶体管在纳米板通道中映射了活性载体. 这一突破有助于在门周围设备中精确的连接工程.
科学领域:
- 半导体设备物理学 半导体设备物理
- 材料的表征材料的表征.
- 纳米技术 纳米技术
背景情况:
- 像纳米板FETs (NSFETs) 这样的Gate-all-around (GAA) 架构对于2nm节点及以后至关重要.
- 控制寄生虫抵抗需要精确的结合工程.
- 纳米级载体映射对于先进的半导体表征至关重要.
研究的目的:
- 展示扫描扩散电阻显微镜 (SSRM) 在纳米板道中进行载体映射的进步.
- 为了在超薄的纳米板道中实现纳米尺度分辨率的载体分析.
- 为了验证SSRM在GAA设备的交叉工程中的实用性.
主要方法:
- 优化样本准备用于亚纳米级地形学.
- 使用超尖的钻石探头进行高分辨率测量.
- 实现了线性电流放大器,以减轻对数式放大器器件的缺陷.
主要成果:
- 在5.5nm厚的纳米板通道中实现了SSRM载体映射.
- 在950°C快速热后观察到扩散的增加.
- 载体配置文件与Kinetic蒙特卡洛模拟显示出极好的一致性.
结论:
- 对于NSFET中的载波映射,SSRM已经取得了显著的进展.
- 该技术为GAA设备中的连接形成提供了直接的反.
- 优化的SSRM是半导体工艺开发的宝贵工具.
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