通过变化的CaTiO3厚度调整应变在异质上生长的La2/3Sr1/3MnO3在上的双共振器上
G Tarsi1, N Manca2, L Pellegrino2
1Université Caen Normandie, ENSICAEN, CNRS, Normandie Université, GREYC UMR 6072, F14000 Caen, France.
ACS applied materials & interfaces
|February 11, 2026
概括
研究人员在上创建了悬浮氧化物异构结构,用于机械共振器. 不同的缓冲层厚度控制拉伸应力,达到105.5以上的高机械质量系数.
科学领域:
- 材料科学 材料科学 材料科学
- 纳米技术 纳米技术
- 固态物理 固态物理
背景情况:
- 氧化物异构结构具有独特的电子和机械性能.
- 将这些异构结构与集成是具有挑战性的,但对于设备应用来说是可取的.
- 控制悬浮微型和纳米结构的应变对于优化其机械性能至关重要.
研究的目的:
- 在基板上制造双氧化物梁.
- 调查缓冲层厚度对应变和机械性能的影响.
- 在氧化物基共振器中实现高机械质量因素.
主要方法:
- 脉冲激光沉积 (PLD) 和分子束表 (MBE) 用于薄膜生长.
- 反应性离子蚀刻以释放悬浮的微桥 (宽度为5μm,长度为50250μm).
- 改变CaTiO3缓冲层厚度 (014 nm) 来调整拉伸应力.
主要成果:
- 在上成功制造了悬浮的La2/3Sr1/3MnO3/CaTiO3/SrTiO3异构结构.
- 增加了CaTiO3缓冲层厚度,提高了制造产量和转移了微桥曲率.
- 在500MPa的拉伸应力下,达到超过10^5的机械质量系数.
结论:
- 具有不匹配的网格参数的双氧化物缓冲层有效控制了表轴应变.
- 这种方法使集成氧化共振器具有高应力和高机械Q因子.
- 开发的方法对先进的微型和光机械系统具有前景.
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