Ji Won Heo1, Gwang-Seok Chae2, Gyeong Deok Seo1

  • 1Department of Intelligent Semiconductor Engineering, University of Seoul, Seoul 02504, Republic of Korea.

ACS nano
|February 11, 2026
PubMed
概括

我们开发了一种基于等离子体的方法,用于在二维过渡金属二二基因化物 (TMD) 中创建超低电阻的欧姆接触. 这种技术使得用于下一代电子产品的先进半导体的可扩展制造成为可能.

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