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Updated: Feb 13, 2026

Cryo-electron Microscopy Specimen Preparation By Means Of a Focused Ion Beam
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Cryo-electron Microscopy Specimen Preparation By Means Of a Focused Ion Beam

Published on: July 26, 2014

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通过4D-STEM前置电子衍射和PSNR指标量化聚焦离子束的完整损伤概况

Mateus G Masteghin1,2, Zabeada P Aslam3, Andy P Brown3

  • 1Advanced Technology Institute, University of Surrey, Guildford, UK.

Small methods
|February 12, 2026
PubMed
概括

这项研究使用4D-STEM揭示了完整的离子束形状,通过精确地绘制离子诱导损伤,即便是低剂量,提高了聚焦离子束 (FIB) 应用的精度.

关键词:
在4D-STEM中,损伤档案损伤档案的情况基于衍射的特征表征.聚焦的离子束 (FIB)离子植入植入的离子植入.

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