在SiC元基板上的HEMT涂层器中减少缺陷

Vin-Cent Su1, Ting-Yu Wei1, Meng-Hsin Chen1

  • 1Department of Electrical Engineering, National United University, Miaoli 36003, Taiwan.

PubMed
概括

研究人员探索了新的4H-碳化物 (SiC) 元基质,以减少化 (GaN) 层中的缺陷. 优化元结构几何学显著减少了线程位移,为更好的GaN电子设备铺平了道路.

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