实验研究激光控制爆炸接的微尺寸金属片驱动的能量材料的实验研究
Xiaojun Ye1,2, Dongxian Ye1, Yanshu Fu2
1School of Information and Artificial Intelligence, Nanchang Institute of Science and Technology, Nanchang 330108, China.
Materials (Basel, Switzerland)
|February 13, 2026
概括
这项研究证明了精确的爆炸性接 (EXW) 用于制造可靠的微电子和MEMS接口. 激光控制的高能材料使控制的冲击波用于高速金属粘合,显示了先进包装解决方案的潜力.
科学领域:
- 材料科学 材料科学 材料科学
- 机械工程 机械工程
- 表面工程是什么?表面工程是什么?
背景情况:
- 可靠的接口制造对于微电子和微电子机械系统 (MEMS) 包装至关重要.
- 传统的粘合方法在实现微型组件的高可靠性方面面临挑战.
- 爆炸性接 (EXW) 为先进材料提供了卓越的固态粘合特性.
研究的目的:
- 用聚焦激光能量研究毫克尺度金属的精密爆炸性接 (EXW).
- 评估激光控制的EXW用于Al/Cu粘合的技术可行性和接口质量.
- 分析动态接过程和由此产生的界面微观结构.
主要方法:
- 采用聚焦激光能量来控制液态能量材料以获得精确的EXW.
- 在金属和基板之间高速斜碰撞时产生冲击波.
- 进行现场观测,界面微观结构分析,并对Al/Cu对进行数值模拟.
主要成果:
- 在粘接接口上观察到明显的Al/Cu元素扩散,证实了技术可行性.
- 激光控制的EXW方法证明了Al/Cu粘合接口的成功制造.
- 确定了卸载反弹现象,这是动态冲击过程的特征.
结论:
- 激光控制爆炸接是一种技术上可行的方法,用于制造可靠的微电子和MEMS的Al/Cu粘接接口.
- 该研究证实了精确EXW在先进接口制造中的潜力.
- 需要进一步优化冲击负载控制,以解决卸载反弹现象,以提高接口质量.
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