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Updated: Feb 14, 2026

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HFCVD参数对钻石涂层的影响以及对蓝宝石晶圆涂层的工艺调查

Wei Feng1, Shuai Zhou1, Xiaokang Sun1

  • 1School of Mechanical Engineering, Yancheng Institute of Technology, Yancheng 224001, China.

Materials (Basel, Switzerland)
|February 13, 2026
PubMed
概括

新的热丝化学蒸气沉积 (HFCVD) 钻石工具增强了蓝宝石晶圆的覆盖. 这些工具提高了超过1μm/h的材料去除速度,同时保持表面粗度低于Ra ≤0.5μm,优化了精密加工.

关键词:
在 HFCVD 系统中,HFCVD 系统是 HFCVD.钻石片是一个钻石片.拉拉拉拉拉拉拉拉拉拉拉拉拉拉拉拉拉拉拉拉拉拉拉拉拉拉拉拉拉拉拉拉拉拉拉拉蓝宝石晶圆 蓝宝石晶圆是一种

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