Yujie Ji1, Peiyan Hu1

  • 1School of Mechanical Engineering, Shenyang Ligong University, Shenyang 110159, China.

PubMed
概括

半导体晶圆处理机器人使用灰优化 (GGO) 来抑制振动. 这种方法通过优化轨迹以实现更快,更流的晶圆运输来提高定位精度和系统稳定性.

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