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在射频应力下对AlGaN/GaN HEMT设备的结构增强的研究
Xingjun Liu1, Hongxia Liu2, Mengwei Su3
1Xidian University, Tai Bai road, Xi'an, Shaanxi, 710126, China.
Nanotechnology
|February 13, 2026
概括
为射频 (RF) 应用优化AlGaN/GaN高电子流动性晶体管 (HEMT),需要了解结构对可靠性的影响. 埋入更深的门和调整的门长度比率显著提高了RF应力抵抗力.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 半导体物理 半导体物理
背景情况:
- 在高频电源应用中,AlGaN/GaN高电子移动性晶体管 (HEMT) 是至关重要的.
- 在射频 (RF) 压力下设备的可靠性是关键性能指标.
- 了解结构参数对HEMT射频应力耐力的影响,对于设备优化至关重要.
研究的目的:
- 在射频压力下研究AlGaN/GaN HEMT的性能和可靠性.
- 用设备级模拟分析结构参数对射频应力抵抗的影响.
- 确定关键的结构修改,以提高设备对射频压力的弹性.
主要方法:
- 商用AlGaN/GaN功率放大器的设备级TCAD模拟.
- 在RF压力之前和之后分析电气特性,故障电压和RF性能.
- 结构参数的系统变化:被动化层厚度,Lgd:Lgs比率和埋入门深度.
主要成果:
- 增加被动化层厚度显示,射频电压抗性的改善有限 (3.45%).
- 将门到排水调整为门到源长度比 (Lgd:Lgs) 提高了38.3%的阻力.
- 增加埋入门深度显著改善了RF应力抵抗44.4%.
结论:
- 结构修改,特别是埋入门深度和Lgd:Lgs比率,有效地提高了AlGaN/GaN HEMT RF应力抵抗力.
- TCAD模拟为优化HEMT设计提供了宝贵的见解,以提高可靠性.
- 优化的结构参数对于强大的高频功率放大器性能至关重要.
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