侧向模式的批量声波共振器使三维纳米结构阵列制造成为可能

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Updated: Aug 4, 2026

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Wei Wei1, Zhaoxun Wang1, Yiming Liu1

  • 1State Key Laboratory of Precision Measuring Technology & Instruments, Tianjin University, Tianjin 300072, China.

Ultrasonics
|February 15, 2026
PubMed
概括

本研究介绍了一种新的声学制造方法,用于创建精确的3D表面纳米结构. 该技术克服了传统方法的局限性,为先进的制造应用实现了快速,可定制和无面具的纳米图案.

关键词:
一个声学流体.大规模的声波波是声波.在GHz中,GHz是GHz.侧向模式 侧向模式三维纳米结构的三维纳米结构

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