门局部化使增强模式AlGaN/GaN高电子移动性晶体管成为可能
Do Wan Kim1, Byungsoo Kim1, Yongjoo Cho2
1Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, Virginia 22904, United States.
概括
一种新的门局部化CHF3等离子体工艺使基于化 (GaN) 的高电子流动性晶体管 (HEMT) 能够正常关闭. 这种方法提供了稳定的门电压控制和低门泄漏,以实现高效的功率电子.
科学领域:
- 材料科学 材料科学 材料科学
- 半导体设备物理 半导体设备物理
背景情况:
- 基于化 (GaN) 的高电子移动性晶体管 (HEMT) 对高功率和高频应用至关重要.
- 增强模式 (E模式) 操作是由于故障安全行为和减少待机功率的功率切换所需的.
- 传统的E模式制造方法面临复杂性,表面损伤和不稳定性等挑战.
研究的目的:
- 开发一种简化和稳定的制造工艺,用于通常使用的AlGaN/GaN HEMT.
- 为了解决传统E模式增强策略的局限性.
主要方法:
- 采用了一个门局部化的CHF3血过程.
- 这一过程创造了自我限制的隙和终结表面.
- 血暴露仅限于门区域,以最大限度地减少表面退化.
主要成果:
- 该过程允许正常关闭AlGaN/GaN HEMT,并在值电压 (Vth) 中保持稳定,正转变.
- 的结合补偿了极化电荷,而被动化了缺陷.
- 制造的设备显示正常关闭运行,在偏向应力下,门泄漏率低.
结论:
- 门局部化CHF3等离子体过程提供了一个实用且稳定的通道到E模式的GaN HEMT.
- 这种方法避免了深度入,减轻了制造复杂性和不稳定性.
- 开发的方法适用于节能,高频和高功率的电子系统.
相关概念视频
MOSFET: Enhancement Mode
856
Enhancement-mode MOSFETs are pivotal components in electronics, distinguished by their capacity to act as highly efficient switches. They are part of the larger family of metal-oxide Semiconductor Field-Effect Transistors (MOSFETs). They are available in two types: p-channel and n-channel, each tailored to specific polarity operations.
In their basic form, enhancement-mode MOSFETs are typically non-conductive when the gate-source voltage (Vgs) is zero. This default 'off' state means no...
In their basic form, enhancement-mode MOSFETs are typically non-conductive when the gate-source voltage (Vgs) is zero. This default 'off' state means no...
856
MOSFET: Depletion Mode
894
Depletion-mode MOSFETs represent a unique subset of MOSFET technology, functioning fundamentally differently from their enhancement-mode counterparts. Unlike enhancement MOSFETs, which require a positive gate-source voltage (Vgs) to turn on, depletion-mode MOSFETs are inherently conductive and "normally on" devices.
The primary characteristic of depletion-mode MOSFETs is their ability to conduct current between the drain and source terminals without gate bias. This inherent conductivity...
The primary characteristic of depletion-mode MOSFETs is their ability to conduct current between the drain and source terminals without gate bias. This inherent conductivity...
894
Field Effect Transistor
1.3K
Field-effect transistors (FETs) are integral to electronic circuits and distinguished by their three-terminal setup: the gate, drain, and source. These transistors operate as unipolar devices, which utilize either electrons or holes as charge carriers, in contrast to bipolar transistors, which use both types of carriers. The primary function of the FET is to modulate the flow of these carriers from the source to the drain through a channel. The voltage difference between the gate and source...
1.3K
Biasing of Metal-Semiconductor Junctions
674
Biasing metal-semiconductor junctions involves applying a voltage across the junction. Specifically, the metal is connected to a voltage source, while the semiconductor is grounded. This technique is essential for controlling the direction and magnitude of current flow in electronic devices, including diodes, transistors, and photovoltaic cells.
In Schottky junctions, where the semiconductor is n-type, applying a positive voltage to the metal relative to the semiconductor reduces its Fermi...
In Schottky junctions, where the semiconductor is n-type, applying a positive voltage to the metal relative to the semiconductor reduces its Fermi...
674
Biasing of FET
748
Biasing a Junction Field Effect Transistor (JFET) is crucial for setting operational parameters and ensuring efficient functioning in electronic circuits. JFETs are characterized by using a single carrier type in N-channel or P-channel configurations, where the channel is surrounded by PN junctions. These junctions are central to the device's ability to control current flow.
In an N-channel JFET, the structure consists of N-type material forming the channel on a P-type substrate, with the...
In an N-channel JFET, the structure consists of N-type material forming the channel on a P-type substrate, with the...
748
Characteristics of MOSFET
1.1K
Metal-oxide-semiconductor field-effect Transistors, or MOSFETs, play a critical role in electronic circuits. They are primarily utilized for amplifying and switching signals.
Various vital parameters influence their functionality, which is crucial for theory and electronics applications. First, channel dimensions, precisely length, and width, are pivotal. The size of these channels affects the transistor's ability to carry current and switching speeds; shorter channels typically enable...
Various vital parameters influence their functionality, which is crucial for theory and electronics applications. First, channel dimensions, precisely length, and width, are pivotal. The size of these channels affects the transistor's ability to carry current and switching speeds; shorter channels typically enable...
1.1K


