悬浮波导增强的近红外光热光谱仪用于ppb级分子气体检测,采用石化片芯片
Kaiyuan Zheng1,2, Hanyu Liao1,2, Fengbo Han3
1Department of Electrical and Electronic Engineering and Photonics Research Institute, The Hong Kong Polytechnic University, 999077, Hong Kong, China.
Light, science & applications
|February 17, 2026
概括
我们开发了悬浮石化玻璃波导增强光热光谱学 (PTS) 用于高度敏感的气体传感. 这种新的方法实现了十亿分之一的检测极限,克服了芯片内传感器以前的局限性.
科学领域:
- 光子学 是一个光子学.
- 频谱学是一种光谱学.
- 材料科学 材料科学 材料科学
背景情况:
- 芯片上的波导传感器具有高的集成潜力,但由于光气相互作用有限,在传统的激光吸收光谱中敏感性较低.
- 芯片上的光热光谱 (PTS) 显示出更高灵敏度的希望,但受到 evanescent 场分数和固体基板中的热散射的限制.
研究的目的:
- 通过开发悬浮化玻璃波导 (ChGW) 增强的方法来克服芯片上PTS的灵敏度限制.
- 通过使用集成光子设备实现高度敏感的 (每十亿分之一级) 分子气体传感.
主要方法:
- 使用CMOS兼容的两步模式制造工艺制造纳米级悬浮CHGW,实现低光学损失.
- 开发一个相当的PTS模型,以优化ChGW几何,以提高光热相调节效率.
- 与高对比波导面形成的法布里-佩罗干扰仪集成,用于敏感的检测.
主要成果:
- 实现了吸收诱导热源功率的4倍增加和相当的导热率的10.6倍降低.
- 与非悬浮波导相比,光热相调节效率提高了45倍.
- 达到了前所未有的330ppb的乙烯检测极限,~6个数量级的动态范围,响应时间<1秒.
结论:
- 悬浮的ChGW增强的PTS显著提高了芯片上分子气体传感的灵敏度,达到ppb水平.
- 开发的系统为光子波导气体传感器设定了一个新的基准,其噪声等效吸收系数为3.8×10-7cm-1.
- 这一进步为构建集成,高度敏感和无背景光子传感器芯片应用程序的原型铺平了道路.
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