铜微柱阵列的热诱导的爬行和粘弹性行为
Miao Wang1, Jihua Zhang1, Libin Gao1
1State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, China.
Advanced science (Weinheim, Baden-Wurttemberg, Germany)
|February 18, 2026
概括
铜微柱阵列的热处理显著改变了它们的爬行行为和可靠性. 优化的热处理提高了微尺度液体冷却应用的热性能.
科学领域:
- 材料科学 材料科学 材料科学
- 机械工程 机械工程
- 热管理 热管理
背景情况:
- 微通道中的铜微柱阵列提供了极好的散热.
- 长期可靠性受到热力学爬行变形的挑战.
研究的目的:
- 研究热处理如何影响铜微柱的爬行,粘性弹性和变形机制.
- 建立设计可靠和高性能铜微柱阵列用于微尺度冷却的框架.
主要方法:
- 通过通过玻璃通道 (TGVs) 内的电沉积制造铜微柱阵列.
- 纳米印爬行测试与电子反射衍射 (EBSD) 和传输电子显微镜 (TEM) 分析相结合.
- 使用一般化的凯尔文模型对粘弹性响应的表征和对具有不同距离的数组的热性能测试.
主要成果:
- 在200°C的热处理导致了以谷物边界为媒介的变形,具有显著的爬行 (101 nm).
- 在300°C的热处理通过增加脱位密度和固定粒边界,抑制粘弹性放松,减少了爬行 (42nm).
- 距离70微米的阵列显示了最高的温度升高 (46.5°C),表明热传输增强.
结论:
- 热处理对铜微柱的微结构,爬行机制和粘弹性特性进行了严格的控制.
- 建立了一个微结构-机制-属性框架,以优化铜微柱阵列,以平衡微尺度液冷中的可靠性和热性能.
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