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在220nm在绝缘体平台上的低极化灵敏度高速光学开关

Wei Gao, Jinwei Su, Yu Zhou

|February 20, 2026

概括

我们开发了一个低偏振灵敏度的马赫-泽恩德干扰仪 (MZI) 光学开关在在绝缘体上. 这种高速开关实现了快速切换速度和低插入损失,非常适合人工智能应用.

科学领域:

光子学和光学工程光子学和光学工程
集成光学集成光学集成光学
半导体设备半导体设备

背景情况:

高保真信号切换需要光学交换机,可以管理随机偏振的信号.
现有的光学交换机往往在极化灵敏度方面扎,这限制了它们在苛刻应用中的性能.

研究的目的:

为了展示一种新的2x2低极化灵敏度,高速马赫-泽恩德干扰仪 (MZI) 光学开关.
为了利用在绝缘体 (SOI) 平台和标准的多项目晶圆 (MPW) 工艺进行制造.

主要方法:

集成了两个极化不敏感的3dB分离器,使用准-adiabatic合.
整合了两个极化不敏感的高速相变换器,使用PIN-二极管驱动的脊波导.
在220nm厚的SOI平台上制造了光学开关.

主要成果:

在1550nm时,TE0模式的插入损失为0.92dB,TM0模式的输入损失为2.79dB.
证明TE0模式的切换速度为52.2 ns,TM0模式的切换速度为55.0 ns.
该设备具有低极化灵敏度和高速操作.

结论:

制造的MZI光学开关提供高速,低损耗和极化不敏感的性能.
它的CMOS兼容性和可扩展性使其适用于人工智能应用中的大规模高保真切换.
进一步优化可以增强其对未来光子集成电路的功能.

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