概括
这项研究引入了一种新的芯片加速度计,使用低声画廊模式 (WGM) 微声共振器. 该设备为集成光学传感应用提供高性能和稳定性.
科学领域:
- 光子学 是一个光子学.
- 微电子机械系统 (MEMS) 是指微电子机械系统.
- 有光学传感器的感应器.
背景情况:
- 高质量的微声画廊模式 (WGM) 光学微腔适用于加速度计.
- 现有的WGM加速度计由于离芯片组件和合方法而具有大的足迹和不良稳定性等局限性.
研究的目的:
- 开发一种新的芯片加速度计.
- 为了克服传统WGM加速度计的局限性.
- 在标准的SOI平台上利用合调制WGM微环共振器.
主要方法:
- 在芯片上的加速度计的制造,使用合调制WGM微环共振器在在绝缘体 (SOI) 平台上.
- 使用一个集成的悬臂光束,其振动,诱导加速,调节一个马赫-泽恩德干扰仪 (MZI) 的相位移.
- 通过调节合条件,将MZI相位移转转化为输出强度变化.
主要成果:
- 实现了10 ng/√Hz的噪声等效加速.
- 展示了10.5mm × 15mm的紧足迹.
- 芯片上的设计提供了对光谱响应的精确和稳定的控制.
结论:
- 拟议的芯片加速度计克服了现有设备的局限性.
- 兼容CMOS的单体架构确保了稳定性和可扩展性.
- 该设备显示出大规模集成光学传感应用的巨大潜力.
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